검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
CMP of ultra low-k material porous-polysilazane (PPSZ) for interconnect applications Chang TC, Tsai TM, Liu PT, Chen CW, Yan ST, Aoki H, Chang YC, Tseng T Thin Solid Films, 447, 524, 2004 |
| 2 |
Structural characteristics and interfacial reactions of low dielectric constant porous polysilazane for Cu metallization Wang JH, Liu PT, Chang TS, Chang TC, Chen LJ Thin Solid Films, 469-470, 393, 2004 |