검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Improvement of the dose uniformity in plasma immersed ion implantation by introducing a vertical biased ring Stamate E, Holtzer N, Sugai H Thin Solid Films, 506, 571, 2006 |
| No. | Article |
|---|---|
| 1 |
Improvement of the dose uniformity in plasma immersed ion implantation by introducing a vertical biased ring Stamate E, Holtzer N, Sugai H Thin Solid Films, 506, 571, 2006 |