검색결과 : 1건
No. | Article |
---|---|
1 |
Development of plasma dielectric deposition method for increased pre-metal dielectric interfacial film stability Lobbins JM, Pearton SJ, Ren F Solid-State Electronics, 46(9), 1367, 2002 |
No. | Article |
---|---|
1 |
Development of plasma dielectric deposition method for increased pre-metal dielectric interfacial film stability Lobbins JM, Pearton SJ, Ren F Solid-State Electronics, 46(9), 1367, 2002 |