검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Feedback control of plasma electron density and ion energy in an inductively coupled plasma etcher Lin C, Leou KC, Huang HM, Hsieh CH Journal of Vacuum Science & Technology A, 27(1), 157, 2009 |
| 2 |
Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system Suzuki K, Ishihara Y, Sakoda K, Shirai Y, Teramoto A, Hirayama M, Ohmi T, Watanabe T, Ito T Journal of Vacuum Science & Technology A, 27(3), 465, 2009 |