| 1 |
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Fu YQ, Luo JK, Nguyen NT, Walton AJ, Flewitt AJ, Zu XT, Li Y, McHale G, Matthews A, Iborra E, Du H, Milne WI
PROGRESS IN MATERIALS SCIENCE, 89, 31, 2017 |
| 2 |
AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
Lin CM, Chen YY, Felmetsger VV, Senesky DG, Pisano AP
Advanced Materials, 24(20), 2722, 2012 |
| 3 |
Epitaxial growth and electrical measurement of single crystalline Pb(Zr0.52Ti0.48)O-3 thin film on Si(001) for micro-electromechanical systems
Yin S, Niu G, Vilquin B, Gautier B, Le Rhun G, Defay E, Robach Y
Thin Solid Films, 520(14), 4572, 2012 |
| 4 |
Residual stress in piezoelectric poly(vinylidene-fluoride-co-trifluoroethylene) thin films deposited on silicon substrates
Oh SR, Yao K, Chow CL, Tay FEH
Thin Solid Films, 519(4), 1441, 2010 |
| 5 |
Pulsed laser deposition and characterization of PZT thin films
Verardi P, Dinescu M, Craciun F
Applied Surface Science, 154, 514, 2000 |
