검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Large area VHF plasma production using a ladder-shaped electrode Mashima H, Yamakoshi H, Kawamura K, Takeuchi Y, Noda M, Yonekura Y, Takatsuka H, Uchino S, Kawai Y Thin Solid Films, 506, 512, 2006 |
| No. | Article |
|---|---|
| 1 |
Large area VHF plasma production using a ladder-shaped electrode Mashima H, Yamakoshi H, Kawamura K, Takeuchi Y, Noda M, Yonekura Y, Takatsuka H, Uchino S, Kawai Y Thin Solid Films, 506, 512, 2006 |