검색결과 : 1건
No. | Article |
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1 |
Characterization of a high-frequency inductively coupled plasma source Lee DS, Jun HS, Chang HY Thin Solid Films, 506, 469, 2006 |
No. | Article |
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1 |
Characterization of a high-frequency inductively coupled plasma source Lee DS, Jun HS, Chang HY Thin Solid Films, 506, 469, 2006 |