검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Thermodynamic and transport properties of two-temperature oxygen plasmas Ghorui S, Heberlein JVR, Pfender E Plasma Chemistry and Plasma Processing, 27(3), 267, 2007 |
| 2 |
On the use of global kinetics models for the investigation of energy deposition and chemistry in RF argon-oxygen plasmas working in the torr regime Morscheidt W, Hassouni K, Bauduin N, Arefi-Khonsari F, Amouroux J Plasma Chemistry and Plasma Processing, 23(1), 117, 2003 |
| 3 |
Reactive ion etch of patterned and blanket silver thin films in Cl-2/O-2 and O-2 glow discharges Nguyen P, Zeng YX, Alford TL Journal of Vacuum Science & Technology B, 17(5), 2204, 1999 |