검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma enhanced chemical vapor deposition of nitrogen-incorporated silicon oxide films using TMOS/N2O gas Kang MS, Chung TH, Kim Y Thin Solid Films, 506, 45, 2006 |
| No. | Article |
|---|---|
| 1 |
Plasma enhanced chemical vapor deposition of nitrogen-incorporated silicon oxide films using TMOS/N2O gas Kang MS, Chung TH, Kim Y Thin Solid Films, 506, 45, 2006 |