검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-density inductively coupled plasma chemical vapor deposition of silicon nitride for solar cell application Parm IO, Kim K, Lim DG, Lee JH, Heo JH, Kim J, Kim DS, Lee SH, Yi J Solar Energy Materials and Solar Cells, 74(1-4), 97, 2002 |