화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Influence of oxidation temperature on the interfacial properties of n-type 4H-SiC MOS capacitors
Jia YF, Lv HL, Song QW, Tang XY, Xiao L, Wang LY, Tang GM, Zhang YM, Zhang YM
Applied Surface Science, 397, 175, 2017
2 The search for near interface oxide traps - First-principles calculations on intrinsic SiO2 defects
Knaup JM, Deak P, Gali A, Hajnal Z, Frauenheim T, Choyke JW
Materials Science Forum, 483, 569, 2005
3 Electrically active traps at the 4H-SiC/SiO2 interface responsible for the limitation of the channel mobility
Bassler M, Afanas'ev VV, Pensl G, Schulz M
Materials Science Forum, 338-3, 1065, 2000
4 MOSFET performance of 4H-, 6H-, and 15R-SiC processed by dry and wet oxidation
Yano H, Kimoto T, Matsunami H, Bassler M, Pensl G
Materials Science Forum, 338-3, 1109, 2000