화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Growth of 4H-SiC epilayers with low surface roughness and morphological defects density on 4 degrees off-axis substrates
Dong L, Sun GS, Yu J, Zheng L, Liu XF, Zhang F, Yan GG, Li XG, Wang ZG
Applied Surface Science, 270, 301, 2013
2 Growth of silicon carbide: process-related defects
Yakimova R, Syvajarvi M, Iakimov T, Jacobsson H, Kakanakova-Georgieva A, Raback P, Janzen E
Applied Surface Science, 184(1-4), 27, 2001