검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deep UV excitation Raman spectroscopy of homoepitaxial 4H-SiC films grown by microwave plasma chemical vapor deposition Okamoto M, Kosugi R, Nakashima S, Fukuda K, Arai K Materials Science Forum, 457-460, 629, 2004 |
| No. | Article |
|---|---|
| 1 |
Deep UV excitation Raman spectroscopy of homoepitaxial 4H-SiC films grown by microwave plasma chemical vapor deposition Okamoto M, Kosugi R, Nakashima S, Fukuda K, Arai K Materials Science Forum, 457-460, 629, 2004 |