검색결과 : 22건
| No. | Article |
|---|---|
| 1 |
Improvement of PECVD Silicon-Germanium Crystallization for CMOS Compatible MEMS Applications Guo B, Severi S, Bryce G, Claes G, Van Hoof R, Du Bois B, Haspeslagh L, Witvrouw A, Decoutere S Journal of the Electrochemical Society, 157(2), D103, 2010 |
| 2 |
Low Stress Heteroepitaxial 3C-SiC Films Characterized by Microstructure Fabrication and Finite Elements Analysis Anzalone R, Camarda M, Locke C, Alquier D, Severino A, Italia M, Rodilosso D, Tringali C, La Magna A, Foti G, Saddow SE, La Via F, D'Arrigo G Journal of the Electrochemical Society, 157(4), H438, 2010 |
| 3 |
Cu Electrodeposition from Methanesulfonate Electrolytes for ULSI and MEMS Applications Hasan M, Rohan JF Journal of the Electrochemical Society, 157(5), D278, 2010 |
| 4 |
Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces Ow YS, Azimi S, Breese MBH, Teo EJ, Mangaiyarkarasi D Journal of Vacuum Science & Technology B, 28(3), 500, 2010 |
| 5 |
Radioisotope-powered ion gauge with super high stability, long life, and large sensitivity range from ultrahigh vacuum to high pressure Lu YR, Lal A Journal of Vacuum Science & Technology B, 28(5), L52, 2010 |
| 6 |
Time Effects in the Electrodeposition of CoPt Magnetic Alloys Gileadi E, Berkh O, Shacham-Diamand Y Electrochemical and Solid State Letters, 12(8), D53, 2009 |
| 7 |
Fabrication and Characterization of a Thin mu-PEMFC with Microfabricated Grooves on Electroformed Current Collector Plate Ito T, Kaneko S, Kunimatsu M Electrochemical and Solid State Letters, 12(11), B154, 2009 |
| 8 |
Selective Polishing of Polysilicon during Fabrication of Microelectromechanical Systems Devices Veera PRD, Natarajan A, Hegde S, Babu SV Journal of the Electrochemical Society, 156(6), H487, 2009 |
| 9 |
Characterization of an Elastically Stretchable Microelectrode Array and Its Application to Neural Field Potential Recordings Graudejus O, Yu Z, Jones J, Morrison B, Wagner S Journal of the Electrochemical Society, 156(6), P85, 2009 |
| 10 |
Molecularly thick dicationic ionic liquid films for nanolubrication Palacio M, Bhushan B Journal of Vacuum Science & Technology A, 27(4), 986, 2009 |