검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of ion transportation in high-aspect-ratio holes from fluorocarbon plasma for SiO2 etching Noda S, Ozawa N, Kinoshita T, Tsuboi H, Kawashima K, Hikosaka Y, Kinoshita K, Sekine M Thin Solid Films, 374(2), 181, 2000 |