검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of surface treatment of Si substrates and annealing condition on high-k rare earth oxide gate dielectrics Ohshima C, Taguchi J, Kashiwagi I, Yamamoto H, Ohmi S, Iwai H Applied Surface Science, 216(1-4), 302, 2003 |
| No. | Article |
|---|---|
| 1 |
Effect of surface treatment of Si substrates and annealing condition on high-k rare earth oxide gate dielectrics Ohshima C, Taguchi J, Kashiwagi I, Yamamoto H, Ohmi S, Iwai H Applied Surface Science, 216(1-4), 302, 2003 |