검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Characteristics of organic-inorganic hybrid plasma polymer thin films for low-kappa ILD applications Cho SJ, Bae IS, Boo JH Thin Solid Films, 518(22), 6417, 2010 |
| 2 |
A hybrid experimental/numerical approach to characterize interfacial adhesion in multilayer low-kappa thin film specimens Kitey R, Sottos NR, Geubelle PH Thin Solid Films, 519(1), 337, 2010 |
| 3 |
X-ray metrology for advanced silicon processes Wyon C, Gonchond JP, Delille D, Michallet A, Royer JC, Kwakman L, Marthon S Applied Surface Science, 253(1), 21, 2006 |
| 4 |
Effect of porosity and adhesion promoter layer on adhesion energy of nanoporous inorganic low-kappa Damayanti M, Gan ZH, Sritharan T, Mhaisalkar SG, Naman A, Widodo J, Tan HS Thin Solid Films, 504(1-2), 213, 2006 |
| 5 |
In-line monitoring of advanced microelectronic processes using combined X-ray techniques Wyon C, Delille D, Gonchond JP, Heider F, Kwakman L, Marthon S, Mazor I, Michallet A, Muyard D, Perino-Gallice L, Royer JC, Tokar A Thin Solid Films, 450(1), 84, 2004 |
| 6 |
Fluorine incorporation in plasma-polymerized octofluorocyclobutane, hexafluoropropylene and trifluoroethylene Sandrin L, Silverstein MS, Sacher E Polymer, 42(8), 3761, 2001 |
| 7 |
Crack formation in TiN films deposited on Pa-n due to large thermal mismatch Gadre KS, Alford TL Thin Solid Films, 394(1-2), 125, 2001 |
| 8 |
Synthesis and characterization of fluorinated benzoxazole polymers with high T-g and low dielectric constant Dang TD, Mather PT, Alexander MD, Grayson CJ, Houtz MD, Spry RJ, Arnold FE Journal of Polymer Science Part A: Polymer Chemistry, 38(11), 1991, 2000 |