검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
UV photon assist ionization for low temperature plasma Chae SH, Seo SH, Chang HY Current Applied Physics, 6(2), 235, 2006 |
| 2 |
Production of low electron temperature ECR plasma for plasma processing Itagaki N, Ueda Y, Ishii N, Kawai Y Thin Solid Films, 390(1-2), 202, 2001 |