검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A study on the formation and characteristics of the Si-O-C-H composite thin films with low dielectric constant for advanced semiconductor devices Yang CS, Oh KS, Ryu JY, Kim DC, Shou-Yong J, Choi CK, Lee HJ, Um SH, Chang HY Thin Solid Films, 390(1-2), 113, 2001 |