검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Impact of process parameters on pattern formation in the maskless plasmonic computational lithography Kim SK Current Applied Physics, 15(6), 698, 2015 |
| 2 |
Aerial image formation of quantum lithography for diffraction limit Kim SK Current Applied Physics, 12(6), 1566, 2012 |
| 3 |
Optical lithography simulation for the whole resist process Kim SK, Lee JE, Park SW, Oh HK Current Applied Physics, 6(1), 48, 2006 |