검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Accuracy of differential method to distinguish crystal originated particles from light point defects in Czochralski-grown silicon wafers Shimoi N, Kurokawa M, Tanabe A, Koizumi N, Matsushita Y Journal of Crystal Growth, 210(1-3), 31, 2000 |