화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Fast growth and doping characteristics of alpha-SiC in horizontal cold-wall chemical vapor deposition
Nakamura S, Kimoto T, Matsunami H
Materials Science Forum, 389-3, 183, 2002
2 Deep Level investigation of pn-junctions formed by MeV aluminum and boron implantation into 4H-SiC
Schoner A, Miyamoto N, Kimoto T, Matsunami H
Materials Science Forum, 353-356, 451, 2001
3 Observation of deep levels in SiC by optical-isothermal capacitance transient spectroscopy
Kobayashi S, Imai S, Hayami Y, Kushibe M, Shinohe T, Okushi H
Materials Science Forum, 338-3, 757, 2000