검색결과 : 3건
No. | Article |
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1 |
Microcrystalline silicon thin film deposition from silicon tetrafluoride: Isolating role of ion energy using tailored voltage waveform plasmas Wang JK, Daineka D, Elyaakoubi M, Johnson EV Solar Energy Materials and Solar Cells, 190, 65, 2019 |
2 |
Effects of strong magnetic field on carbon nanotube formation using rf glow-discharge plasma Kaneko T, Matsuoka H, Hirata T, Hatakeyama R, Tohji K Thin Solid Films, 506, 259, 2006 |
3 |
Transport Through Multicomponent Dual-Frequency Plasma Sheaths Myers FR, Peters MW, Ramaswami M, Cale TS Thin Solid Films, 253(1-2), 522, 1994 |