화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Microcrystalline silicon thin film deposition from silicon tetrafluoride: Isolating role of ion energy using tailored voltage waveform plasmas
Wang JK, Daineka D, Elyaakoubi M, Johnson EV
Solar Energy Materials and Solar Cells, 190, 65, 2019
2 Effects of strong magnetic field on carbon nanotube formation using rf glow-discharge plasma
Kaneko T, Matsuoka H, Hirata T, Hatakeyama R, Tohji K
Thin Solid Films, 506, 259, 2006
3 Transport Through Multicomponent Dual-Frequency Plasma Sheaths
Myers FR, Peters MW, Ramaswami M, Cale TS
Thin Solid Films, 253(1-2), 522, 1994