검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Diluted nitric oxide (NO) annealing of SiO2/4H-SiC in cold-wall oxidation furnace Kosugi R, Fukuda K Materials Science Forum, 457-460, 1345, 2004 |
| 2 |
Reduction of interface trapped density of SiO2/4H-SiC by oxidation of atomic oxygen Kosugi R, Fukuda K, Arai K Materials Science Forum, 433-4, 563, 2002 |