검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Generating integrated-circuit patterns via cutting and stitching of gratings Zhao L, Xuan Y, Qi MH Journal of Vacuum Science & Technology B, 27(6), 2750, 2009 |
| 2 |
Understanding the effects of photoacid distribution homogeneity and diffusivity on critical dimension control and line edge roughness in chemically amplified resists Lee CT, Lawson RA, Henderson CL Journal of Vacuum Science & Technology B, 26(6), 2276, 2008 |