화학공학소재연구정보센터
검색결과 : 26건
No. Article
1 Module Level Electronic Circuit Based PV Array for Identification and Reconfiguration of Bypass Modules
Murtaza AF, Sher HA, Al-Haddad K, Spertino F
IEEE Transactions on Energy Conversion, 36(1), 380, 2021
2 Selective Chemical Vapor Deposition-Grown Ru for Cu Interconnect Capping Applications
Yang CC, McFeely FR, Wang PC, Chanda K, Edelstein DC
Electrochemical and Solid State Letters, 13(5), D33, 2010
3 Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
Chang CC, Pan FM, Chen CW
Journal of the Electrochemical Society, 157(2), G62, 2010
4 1H-Benzotriazole Incorporated Pad for Chemical Mechanical Planarization of Copper
Yu JF, Jia DM, Venkataraman SS, Li YZ
Journal of the Electrochemical Society, 157(3), H312, 2010
5 Precision laser micromachining of trenches in GaN on sapphire
Mak GY, Lam EY, Choi HW
Journal of Vacuum Science & Technology B, 28(2), 380, 2010
6 Silicon on insulator nanoscale backside interconnects for atomic and molecular scale circuits
Lwin MHT, Tun TN, Kim HH, Kajen RS, Chandrasekhar N, Joachim C
Journal of Vacuum Science & Technology B, 28(5), 978, 2010
7 Accelerated Superfilling Behavior and Suppressed Agglomeration of CEMOCVD Cu Film Using In Situ Plasma Treatment
Pyo SG, Kim S
Electrochemical and Solid State Letters, 12(1), H14, 2009
8 Suppressor Effects during Copper Superfilling of Sub-100 nm Lines
Huang Q, Baker-O'Neal BC, Kelly JJ, Broekmann P, Wirth A, Emnet C, Martin M, Hahn M, Wagner A, Mayer D
Electrochemical and Solid State Letters, 12(4), D27, 2009
9 Low Temperature Wafer Bonding by Copper Nanorod Array
Wang PI, Lee SH, Parker TC, Frey MD, Karabacak T, Lu JQ, Lu TM
Electrochemical and Solid State Letters, 12(4), H138, 2009
10 Local-Topography-Induced Defects during Tungsten Chemical Mechanical Polishing and Their Impact on Back End of Line
Yu H, Wang XB, Sheng HF, Lu W, Zhou MS
Journal of the Electrochemical Society, 156(1), H64, 2009