검색결과 : 1건
No. | Article |
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1 |
Study of nitrous oxide plasma oxidation of silicon nitride thin films Bose M, Basa DK, Bose DN Applied Surface Science, 158(3-4), 275, 2000 |
No. | Article |
---|---|
1 |
Study of nitrous oxide plasma oxidation of silicon nitride thin films Bose M, Basa DK, Bose DN Applied Surface Science, 158(3-4), 275, 2000 |