검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Experimental investigation on submerged gas-liquid mixture injection into water through a micro-channel Hu L, Shen YN, Chen WY, Fu X International Journal of Multiphase Flow, 83, 39, 2016 |
| 2 |
Polarimetric diagnosis of 193-nm lithography equipment using a mask with newly developed polarization optical elements Nomura H Thin Solid Films, 519(9), 2688, 2011 |
| 3 |
Fabrication for Cu/Hydrogen Silsesquioxane Damascene Structure by Nanoimprint Hsu CC, Huang FS Journal of the Electrochemical Society, 157(4), H443, 2010 |
| 4 |
Defectivity issues in topcoatless photoresists Cantone J, van Dommelen Y, Jiang AQ, Dunn S, Winter T, Petrillo K, Johnson R, Lawson P, Conley W, Callahan R Journal of Vacuum Science & Technology B, 27(6), 3014, 2009 |
| 5 |
Influences of water on photoresist surface in immersion lithography technology Sado M, Teratani T, Fujii H, Iikawa R, Iida H Applied Surface Science, 255(4), 1018, 2008 |
| 6 |
Improving lithography pattern fidelity and line-edge roughness by reducing laser speckle Kritsun O, Lalovic I, Rokitski S, Partlo B, La Fontaine B, Farrar N, Levinson H Journal of Vacuum Science & Technology B, 26(6), 2145, 2008 |
| 7 |
Extreme ultraviolet lithography: Status and prospects Benschop J, Banine V, Lok S, Loopstra E Journal of Vacuum Science & Technology B, 26(6), 2204, 2008 |
| 8 |
Pattern specific optical models Tejnil E, Adam K, Lam MC, Berger G Journal of Vacuum Science & Technology B, 26(6), 2441, 2008 |