검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Depth profiles of boron and nitrogen in SiON films by backside SIMS Sameshima J, Maeda R, Yamada K, Karen A, Yamada S Applied Surface Science, 231-2, 614, 2004 |
| No. | Article |
|---|---|
| 1 |
Depth profiles of boron and nitrogen in SiON films by backside SIMS Sameshima J, Maeda R, Yamada K, Karen A, Yamada S Applied Surface Science, 231-2, 614, 2004 |