검색결과 : 1건
No. | Article |
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1 |
Direct liquid injection metal-organic chemical vapor deposition of HfO2 thin films using Hf(dimethylaminoethoxide)(4) Song MK, Kang SW, Rhee SW Thin Solid Films, 450(2), 272, 2004 |
No. | Article |
---|---|
1 |
Direct liquid injection metal-organic chemical vapor deposition of HfO2 thin films using Hf(dimethylaminoethoxide)(4) Song MK, Kang SW, Rhee SW Thin Solid Films, 450(2), 272, 2004 |