검색결과 : 1건
No. | Article |
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1 |
Experimental and theoretical study of the role of the gas composition and plasma-surface interactions on the SnOx films stoichiometry prepared by DC magnetron reactive sputtering Snyders R, Wautelet M, Gouttebaron R, Dauchot JP, Hecq M Thin Solid Films, 423(2), 125, 2003 |