검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Production of high density and low electron-temperature plasma by a modified grid-biasing method using inductively coupled RF discharge Ikada R, Nishimura G, Kato K, Iizuka S Thin Solid Films, 457(1), 55, 2004 |
| No. | Article |
|---|---|
| 1 |
Production of high density and low electron-temperature plasma by a modified grid-biasing method using inductively coupled RF discharge Ikada R, Nishimura G, Kato K, Iizuka S Thin Solid Films, 457(1), 55, 2004 |