화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Photophoresis on particles hotter/colder than the ambient gas in the free molecular flow
Loesche C, Wurm G, Jankowski T, Kuepper M
Journal of Aerosol Science, 97, 22, 2016
2 Plasma Characteristics and Plasma-Feedstock Interaction Under PS-PVD Process Conditions
Mauer G
Plasma Chemistry and Plasma Processing, 34(5), 1171, 2014
3 Method to determine the sticking coefficient of precursor molecules in atomic layer deposition
Rose M, Bartha JW
Applied Surface Science, 255(13-14), 6620, 2009
4 Mass and heat transfer modeling of a physical vapor deposition effusion source
Junker ST, Birkmire RW, Doyle FJ
AIChE Journal, 51(3), 878, 2005
5 Molecular flow analysis in orifice-restricted tube using Maxwellian distribution function
Shinagawa H, Kuramitsu M, Okuyama K
Journal of Chemical Engineering of Japan, 33(6), 891, 2000