검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fluorine implantation effects on Ta2O5 dielectrics on polysilicon treated with post rapid thermal annealing Chen H, Kao CH, Huang BY, Lo WS Applied Surface Science, 283, 694, 2013 |
| 2 |
Improvement on performance and reliability of TaN/HfO2 LTPS-TFTs with fluorine implantation Ma MW, Chen CY, Su CJ, Wu WC, Yang TY, Kao KH, Chao TS, Lei TF Solid-State Electronics, 52(3), 342, 2008 |