검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of copper thin films on titanium nitride layer prepared by flow modulation CVD technology Cho NI, Kim MC, Rim KH, Chang HJ, Jun K, Shimogaki Y Materials Science Forum, 449-4, 457, 2004 |
| No. | Article |
|---|---|
| 1 |
Deposition of copper thin films on titanium nitride layer prepared by flow modulation CVD technology Cho NI, Kim MC, Rim KH, Chang HJ, Jun K, Shimogaki Y Materials Science Forum, 449-4, 457, 2004 |