검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A mathematical model for material removal and chemical-mechanical synergy in chemical-mechanical polishing at molecular scale Bai J, Zhao YW, Wang YG Applied Surface Science, 253(20), 8489, 2007 |
| No. | Article |
|---|---|
| 1 |
A mathematical model for material removal and chemical-mechanical synergy in chemical-mechanical polishing at molecular scale Bai J, Zhao YW, Wang YG Applied Surface Science, 253(20), 8489, 2007 |