검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Reduction of stacking faults in fast epitaxial growth of 4H-SiC and its impacts on high-voltage Schottky diodes Fujiwara H, Kimoto T, Tojo T, Matsunami H Materials Science Forum, 483, 151, 2005 |
| 2 |
Fast epitaxial growth of thick 4H-SiC with specular surface by chimney-type vertical hot-wall chemical vapor deposition Fujiwara H, Danno K, Kimoto T, Tojo T, Matsunami H Materials Science Forum, 457-460, 205, 2004 |
| 3 |
Fast epitaxial growth of high-quality 4H-SiC by vertical hot-wall CVD Fujihira K, Kimoto T, Matsunami H Materials Science Forum, 433-4, 161, 2002 |