검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Etch characteristics of HfO2 films on Si substrates Norasetthekul S, Park PY, Baik KH, Lee KP, Shin JH, Jeong BS, Shishodia V, Norton DP, Pearton ST Applied Surface Science, 187(1-2), 75, 2002 |
| 2 |
In situ measurements of ultrathin silicon oxide dissolution rates Chopra D, Suni II Thin Solid Films, 323(1-2), 170, 1998 |
| 3 |
Neutral Shadowing in Circular Cylindrical Trench Holes Abrahamshrauner B, Chen WJ Journal of Vacuum Science & Technology B, 14(6), 3492, 1996 |