검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study of Cu and Co gettering mechanism using radioactive isotope tracers Matsukawa K, Naruoka H, Hattori N, Mashiko Y Applied Surface Science, 216(1-4), 371, 2003 |
| 2 |
TEM observation of grown-in defects in CZ and epitaxial silicon wafers detected with optical shallow defect analyzer Minowa K, Takeda K, Tomimatsu S, Umemura K Journal of Crystal Growth, 210(1-3), 15, 2000 |