| 1 |
Vacuum pump age effects by the exposure to the corrosive gases on the Cr etch rate as observed using optical emission spectroscopy in an Ar/O-2/Cl-2 mixed plasma
Park S, Roh HJ, Jang Y, Jeong S, Ryu S, Choe JM, Kim GH
Thin Solid Films, 603, 154, 2016 |
| 2 |
Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas
Han D, Lee HC, Bang JY, Chung CW, Moon SY
Current Applied Physics, 15(9), 1036, 2015 |
| 3 |
Determination of electron energy probability function in low-temperature plasmas from current - Voltage characteristics of two Langmuir probes filtered by Savitzky-Golay and Blackman window methods
Roh HJ, Kim NK, Ryu S, Park S, Lee SH, Huh SR, Kim GH
Current Applied Physics, 15(10), 1173, 2015 |
| 4 |
Control of electron energy distribution function by a rotating magnetic field
Kondo T, Ohta M, Okada S
Thin Solid Films, 523, 34, 2012 |
| 5 |
PIC simulation of RF hydrogen discharges in a transverse magnetic field
Bai J, Sun JZ, Zhang QZ, Wang DZ
Current Applied Physics, 11(5), S140, 2011 |
| 6 |
Development of high-efficiency laser Thomson scattering measurement system for the investigation of EEDF in surface wave plasma
Aramaki M, Kobayashi J, Kono A, Stamate E, Sugai H
Thin Solid Films, 506, 679, 2006 |
| 7 |
Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges
Kim SS, Chung CW, Chang HY
Thin Solid Films, 435(1-2), 72, 2003 |
| 8 |
Formation of negative hydrogen ions in a Ne-H-2 hollow cathode discharge
Petrov GM, Petrova T
Plasma Chemistry and Plasma Processing, 22(4), 573, 2002 |
| 9 |
An investigation of the positive column of a Cd-Ne glow discharge: II. Afterglow
Petrov GM, Petrova T, Ogoyski A, Blagoev A
Plasma Chemistry and Plasma Processing, 21(2), 201, 2001 |
