검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma oxidation of silicon using an electron cyclotron wave resonance (ECWR) oxygen plasma Lai DF, Robertson J, Milne WI Thin Solid Films, 383(1-2), 220, 2001 |
| No. | Article |
|---|---|
| 1 |
Plasma oxidation of silicon using an electron cyclotron wave resonance (ECWR) oxygen plasma Lai DF, Robertson J, Milne WI Thin Solid Films, 383(1-2), 220, 2001 |