검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering Yoon SG, Kang SM, Jung WS, Kim SW, Yoon DH Thin Solid Films, 516(11), 3582, 2008 |
| 2 |
Effect of substrate temperature on surface roughness and optical properties of Ta2O5 using ion-beam sputtering Yoon SG, Kim HK, Kim MJ, Lee HM, Yoon DH Thin Solid Films, 475(1-2), 239, 2005 |