검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etching of SiC with fluorine ECR plasma Forster C, Cimalla V, Kosiba R, Ecke G, Weih P, Ambacher O, Pezoldt J Materials Science Forum, 457-460, 821, 2004 |
| No. | Article |
|---|---|
| 1 |
Etching of SiC with fluorine ECR plasma Forster C, Cimalla V, Kosiba R, Ecke G, Weih P, Ambacher O, Pezoldt J Materials Science Forum, 457-460, 821, 2004 |