검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Performance improvements of tungsten and zinc doped indium oxide thin film transistor by fluorine based double plasma treatment with a high-K gate dielectric Ruan DB, Liu PT, Chiu YC, Yu MC, Gan KJ, Chien TC, Chen YH, Kuo PY, Sze SM Thin Solid Films, 665, 117, 2018 |
| 2 |
Determination of negative ion density in reactive gas plasmas using ion acoustic waves Shindo M, Kawai Y Thin Solid Films, 407(1-2), 204, 2002 |
| 3 |
Electron temperature and ion energy control in modified magnetron-typed RF discharge Shimizu T, Kato K, Li Y, Iizuka S, Sato N Thin Solid Films, 386(2), 248, 2001 |