검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A feature scale model for chemical mechanical planarization of damascene structures Saxena R, Thakurta DG, Gutmann RJ, Gill WN Thin Solid Films, 449(1-2), 192, 2004 |
| No. | Article |
|---|---|
| 1 |
A feature scale model for chemical mechanical planarization of damascene structures Saxena R, Thakurta DG, Gutmann RJ, Gill WN Thin Solid Films, 449(1-2), 192, 2004 |