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| No. | Article |
|---|---|
| 1 |
The effect of deposition temperature on the structure and electrical properties of low-k film using Diethoxymethylsilane (DEMS) prepared by plasma enhanced chemical vapor deposition Cheng YL, We BJ, O'Neill ML, Karwacki EJ Thin Solid Films, 516(2-4), 438, 2007 |