검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Analysis of TMGa output of on-board cylinders for chemical vapor deposition Woelk E, DiCarlo R Journal of Crystal Growth, 452, 226, 2016 |
| 2 |
Control of vapor feed from liquid precursors to the OMVPE process Woelk E, DiCarlo R Journal of Crystal Growth, 393, 32, 2014 |
| 3 |
Performance of a central delivery system for metalorganic precursors Woelk E Journal of Crystal Growth, 312(8), 1340, 2010 |
| 4 |
Influence of gap length and pressure on medium vacuum arc with Ti cathode in various ambient gases Miyano R, Saito T, Takikawa H, Sakakibara T Thin Solid Films, 407(1-2), 221, 2002 |
| 5 |
Anode mode in cathodic arc deposition apparatus with various cathodes and ambient gases Miyano R, Saito T, Kimura K, IKeda M, Takikawa H, Sakakibara T Thin Solid Films, 390(1-2), 192, 2001 |