검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High throughput defect detection with multiple parallel electron beams Van Himbergen HMP, Nijkerk MD, De Jager PWH, Hosman TC, Kruit P Journal of Vacuum Science & Technology B, 25(6), 2521, 2007 |
| 2 |
Experimental results of the stochastic Coulomb interaction in ion projection lithography de Jager PWH, Derksen G, Mertens B, Cekan E, Lammer G, Vonach H, Buschbeck H, Zeininger M, Horner C, Loschner H, Stengl G, Bleeker AJ, Benschop J, Shi F, Volland B, Hudek P, Heerlein H, Rangelow IW, Kaesmaier R Journal of Vacuum Science & Technology B, 17(6), 3098, 1999 |