검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Monitor and eliminate the circular defects in HDP-STI deposition through oxynitride/oxide composite liner Lan JK, Wang YL, Liu CP, Lee WH, Ay C, Cheng YL, Chang SC Thin Solid Films, 447, 645, 2004 |
| No. | Article |
|---|---|
| 1 |
Monitor and eliminate the circular defects in HDP-STI deposition through oxynitride/oxide composite liner Lan JK, Wang YL, Liu CP, Lee WH, Ay C, Cheng YL, Chang SC Thin Solid Films, 447, 645, 2004 |