화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 High temperature deep level transient spectroscopy investigations of n-type 4H-SiC epitaxial layers
Schoner A, Fujihira K, Kimoto T, Matsunami H
Materials Science Forum, 433-4, 387, 2002
2 Fast SiC epitaxial growth in a chimney CVD reactor and HTCVD crystal growth developments
Ellison A, Zhang J, Magnusson W, Henry A, Wahab Q, Bergman JP, Hemmingsson C, Son NT, Janzen E
Materials Science Forum, 338-3, 131, 2000
3 Morphology control for growth of thick epitaxial 4H SiC layers
Zhang J, Ellison A, Janzen E
Materials Science Forum, 338-3, 137, 2000